Active Align
Full Auto
UPH 750
| Item | Description |
| Title | FF/AF Module Active Align System |
| AA Tester (Parallelism) | 4PARA. 4 stages x 6 axis(X,Y,Tx,Ty,Z,R) integrated |
| Each stage has individual AA zone and Fixed Dispenser Needle Cleaner shared; moving in x-axis | |
| Built-in Tester (Qty) | 4x V5FP 1.5G Tester (Fiber Optic + PCIex4)] MIPI 2.0Gbps upgradable in the future |
| Collimator lens | [DFOV] 90DFOV support |
| [Type] RGB CL (basic) / IR CL supportive (optional) | |
| Light Source | [Qty] 2set: 650mm x 635mm effective light source/para (Overlay chart, sensor image Y Direction) |
| [Height] 37cm Real Distance & 2m supportive(with CL) 15cm light source also supportive | |
| [Type] White LED (basic) / IR Light supportive (optional) | |
| Other functions | NVM writing capability |
| AF Module Supportive | |
| Expected UPH | Tester: 750 UPH Handler: 973 UPH |
| Dimension (W*D*H) | 1900 * 1780 *2300mm |
| Weight | Approx. 2,700kg |
Active Align
Full Auto
UPH 750
| Item | Description |
| Title | FF/AF Module Active Align System |
| AA Tester (Parallelism) | 4PARA. 4 stages x 6 axis(X,Y,Tx,Ty,Z,R) integrated |
| Each stage has individual AA zone and Fixed Dispenser Needle Cleaner shared; moving in x-axis | |
| Built-in Tester (Qty) | 4x V5FP 1.5G Tester (Fiber Optic + PCIex4)] MIPI 2.0Gbps upgradable in the future |
| Collimator lens | [DFOV] 90DFOV support |
| [Type] RGB CL (basic) / IR CL supportive (optional) | |
| Light Source | [Qty] 2set: 650mm x 635mm effective light source/para (Overlay chart, sensor image Y Direction) |
| [Height] 37cm Real Distance & 2m supportive(with CL) 15cm light source also supportive | |
| [Type] White LED (basic) / IR Light supportive (optional) | |
| Other functions | NVM writing capability |
| AF Module Supportive | |
| Expected UPH | Tester: 750 UPH Handler: 973 UPH |
| Dimension (W*D*H) | 1900 * 1780 *2300mm |
| Weight | Approx. 2,700kg |
